Analysis of Electronic and Special Gases Using GC-ICP-MS

People are always surprised when told that their computer chips start out as gases. Typically, the chips are made in tools by sequential introduction of various gases and with use of chemical vapor deposition (CVD). Moore’s law to this point has been based on many factors not the least of which been the purity of the gases used in each step of the manufacturing process.

GC-ICP-MS is an important tool in assuring the purity of these gases by measuring the impurities at low ppb and even ppt levels. Most of these gases are either toxic, pyrophoric, or corrosive. Thus strategies of presentation as well as chromatographic analyses of a number of these gases is discussed.

Presenter: Bill Geiger (Senior Partner, CONSCI)

William (Bill) Geiger has over 40 years experience in instrumental analysis. CONSCI specializes in trace analysis of gases including hard to handle, corrosive and toxic gases used in semiconductor and aerospace industries. Our lab has been providing material characterization, purity analysis, and product certification as well as helping customers define their own analytical needs has been our business for over 20 years. We find solutions to customer problems and can provide applications for even the most challenging customer requirements. Bill has made numerous presentation, app notes and other papers on gas chromatography and mass spectrometry including book chapters and coeditor on “Trace Analysis of Specialty and Electronic Gases” with Mark Raynor at Matheson Gas.