Whole Air Canister Sampling and Preconcentration GC-MS Analysis for pptv Levels of Trimethylsilanol in Semiconductor Cleanroom Air
Aplikace | 2013 | RestekInstrumentace
GC/MSD, Purge and Trap, GC/SQ
ZaměřeníŽivotní prostředí
VýrobceAgilent Technologies
Klíčová slovatimeout, trimethylsilanol, time, pptv, measurements, adl, replicate, flow, blanks, standard, desorb, purge, flush, canister, limit, bfb, significance, oven, semiconductor, stable, deviation, exacts, start, group, methylsiloxane, cleanrooms, sweep, vapor, cooling, hexamethyldisilazane, organosilicon, array, yes, mdl, sample, dwell, seven, nutech, detection, analytical, line, cryofocuser, notes, cryofocus, ready, cleanroom, min, sim, sampler, evacuation
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