Sub-ppb detection limits for hydride gas contaminants using GC-ICP-QQQ
Aplikace | 2015 | Agilent TechnologiesInstrumentace
GC, Speciační analýza, ICP/MS/MS
ZaměřeníPrůmysl a chemie, Polovodiče
VýrobceAgilent Technologies
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Application Note Semiconductor Determination of Trace Impurities in Electronic Grade Arsine by GC-ICP-QQQ Sub-ppb detection limits for hydride gas contaminants using a single column, single injection volume, and multi-tune method Authors Introduction William M. Geiger, Blake McElmurry, Jesus Anguiano1 Mark…
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